XY STAGE
SPEC
Split stage
- Weight1.25 ton
- Size가로1500 세로1450 높이1700 (mm)
| Axis | 하부 Y-AXIS Core linear | 상부 X-AXIS Core linear | Z1 AXIS Ball screw |
|---|---|---|---|
| Pay Load | Z1+6 kg | T+60 kg | Z2+4 kg |
| Stroke | 500 mm | 800mm | 100 mm |
| Accuracy | ±5 µm | ±5 µm | ±5 µm |
| Straightness | ±10 µm | ±10 µm | ±10 µm |
| Flatness | ±10 µm | ±10 µm | ±10 µm |
| Repeatability | ±2 µm | ±2 µm | ±2 µm |
| Max. Velocity | 1000 mm/s | 1000 mm/s | 200 mm/s |
| Max. Acceleration | 0.4 G | 0.4 G | 0.1 G |
SPEC
Split stage
- Weight4.25 ton
- Size가로1580 세로2650 높이950(프레임제외) (mm)
| Axis | 하부 Y-AXIS Coreless linear | 상부 X-AXIS Coreless linear | X2 AXIS Core linear |
|---|---|---|---|
| Pay Load | X+20 kg | 20 kg | 10 kg |
| Stroke | 1640 mm | 330 mm | 1020 mm |
| Accuracy | ±3 µm | ±3 µm | ±3 µm |
| Straightness | ±5 µm | ±5 µm | ±5 µm |
| Flatness | ±5 µm | ±5 µm | ±5 µm |
| Repeatability | ±2 µm | ±2 µm | ±2 µm |
| Max. Velocity | 500 mm/s | 500 mm/s | 500 mm/s |
| Max. Acceleration | 0.1 G | 0.1 G | 0.1 G |