SPLIT STAGE
SPEC
Stacked Split stage
- Weight3.2 ton
- Size가로2500 세로1550 높이1930 (mm)
| Axis | 하부 Y-AXIS Core linear | 하부 X1-AXIS Core linear | 상부 X2-AXIS Core linear |
|---|---|---|---|
| Pay Load | X1-Axis(55 kg) | 55 kg | 25 kg |
| Stroke | 450 mm | 500 mm | 1420 mm |
| Accuracy | ±2 µm/ 유효 350 mm |
±2 µm/ 유효 350 mm |
±2 µm/ 유효 350 mm |
| Straightness | ±5 µm/ 유효 350mm |
±5 µm/ 유효 350mm |
±5 µm/ 유효350mm |
| Flatness | ±5 µm/ 유효 350mm |
±5 µm/ 유효 350mm |
±5 µm/ 유효 350mm |
| Repeatability | ±0.5 µm/ 유효 350mm |
±0.5 µm/ 유효 350mm |
±0.5 µm/ 유효 350mm |
| Max. Velocity | 300 mm/s | 300 mm/s | 800 mm/s |
| Max. Acceleration | 0.3 G | 0.3 G | 0.3 G |
SPEC
Stacked stage
- Weight65 kg
- Size가로800 세로730 높이162 (mm)
| Axis | 하부 X-AXIS Ball Screw | 상부 Y-AXISBall Screw |
|---|---|---|
| Pay Load | - | 150 kg |
| Stroke | 200 mm | 40 mm |
| Accuracy | ±15 µm | ±15 µm |
| Repeatability | ±3 um | ±3 um |
| Max. Velocity | 100 mm/s | 100 mm/s |