AIR BEARING STAGE
SPEC
Air bearing stage
- Weight45 ton
- Size가로7100 세로4200 높이1700 (mm)
| Axis | 하부 Y-AXIS Coreless linear | 상부 X-AXIS Coreless linear |
|---|---|---|
| Pay Load | X-Axis(+300kg) | 300 kg |
| Stroke | 2700 mm | 1780 mm |
| Accuracy | ±2 µm | ±2 µm |
| Straightness | ±5 µm | ±5 µm |
| Flatness | ±5 µm | ±5 µm |
| Repeatability | ±1 µm | ±1 µm |
| Max. Velocity | 400 mm/s | 400 mm/s |
| Max. Acceleration | 0.1 G | 0.1 G |
SPEC
Air bearing stage
- Weight1.2 ton
- Size가로1420 세로1100 높이920 (mm)
| Axis | 하부 Y-AXISCoreless linear Air bearing | 상부 X-AXISCoreless linear Air bearing |
|---|---|---|
| Pay Load | - | 5 kg |
| Stroke | 400 mm | 400 mm |
| Accuracy | ±1 µm | ±1 µm |
| Straightness | ±3 µm | ±3 µm |
| Flatness | ±3 µm | ±3 µm |
| Repeatability | ± 0.5 um | ± 0.5 um |
| Max. Velocity | 500 mm/s | 500 mm/s |
| Max. Acceleration | 0.10 G | 0.10 G |