STACKED STAGE
SPEC
Dual Split stage
- Weight3.5 ton
- Size가로1500 세로2500 높이2350 (mm)
| Axis | 하부 Y-AXIS Coreless linear | 상부 X-AXISCore linear |
|---|---|---|
| Pay Load | 30 kg | 25 kg |
| Stroke | 2000 mm | 500 mm |
| Accuracy | ±2 µm | ±2 µm |
| Straightness | ±20 µm | ±20 µm |
| Flatness | ±20 µm | ±20 µm |
| Repeatability | ±2 um | ±2 um |
| Max. Velocity | 500 mm/s | 500 mm/s |
| Max. Acceleration | 0.3 G | 0.3 G |
SPEC
Dual Split stage
- Weight3.2 ton
- Size가로1750 세로1350 높이1700 (mm)
| Axis | 하부 Y-AXIS 1, 2 Ball screw | 상부 X-AXIS 1Ball screw | 상부 X-AXIS 3Ball screw | Z-AXIS 1Ball screw |
|---|---|---|---|---|
| Pay Load | 25 kg | Z1, 2+40 kg | 15 kg | 40 kg |
| Stroke | 850 mm | 700 mm | 930 mm | 50 mm |
| Accuracy | ±3 µm | ±3 µm | ±3 µm | ±3 µm |
| Straightness | ±10 µm | ±10 µm | ±10 µm | ±10 µm |
| Flatness | ±10µm | ±10 µm | ±10 µm | ±10 µm |
| Repeatability | ±1.5 um | ±1.5 um | ±1.5 um | ±1.5 um |
| Max. Velocity | 500 mm/s | 500 mm/s | 700 mm/s | 60 mm/s |
| Max. Acceleration | 0.3 G | 0.3 G | 0.3 G | 0.2 G |